CF4
Carbon tetrafluoride, CF4
Physical Properties: colorless gas which is insoluble in water.
Application: plasma etching process, as laser gas, low temperature refrigerant, solvent, and coolant for infrared inspection wave.
Melting point: -184℃
Boiling point: -130℃
Critical temperature: -45.5℃
Critical pressure: 3.74MPa
Refractive index: 1.113 (-53ºC)
Saturated vapor pressure: 13.33kPa (-150.7ºC)
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